Product Details
Budding products
Compact solenoid proportional valve【Special-order product】
- Model No.
- 3QB
- Industry
- Semiconductor manufacturing process (pre-process)
A proportional solenoid valve that controls flow rate in proportion to the electric current.
Ultra-compact 10 mm width, silent design.Contributes to equipment space saving.
- Documents / Download
PDF Catalog
CKD plus Members Only
- Features
[Ultra-compact]
10 mm coil width.
Can be installed near the controlled object.
[Flow Rate Adjustment Range: 0 to 9 L/min]
Proportional control of minute flow rates is possible.
*Hysteresis
12 VDC: 10%
24 V: 20%
[Semiconductor Front-End Process]
Can be used in processes such as semiconductor resist coating, where space-saving components are required.
- Variations
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- Model No.3QB11OP
- Product name
- Single valve【Special-order product】
- Port size
- M5, φ4 barbed fitting
- Remarks
- Model No.M3QB11OP
- Product name
- Individual wiring manifold【Special-order product】
- Port size
- M5, φ4 barbed fitting
- Remarks