Product Details
Regulator for process gas
Regulator for process gas
- Model No.
- PGM
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
CKD's process gas regulators boast industry-leading sealing performance, hysteresis, and repeatability.
Achieves a stable process through high-precision pressure/flow rate adjustment of supply gas.
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Safety Precautions
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- Features
[High sealability]
Contributes to process stabilization
- Optimal design of valve seat and ultra-precise machining
- Minimizes leakage (outflow) to the secondary side when the valve is closed
[High micro flow rate controllability]
Achieves stable and smooth operation
- Optimized design of valve seat shape
- Stable control even at very small flow rates
[Hysteresis reduction]
Goals pressure is met securely
- High-quality materials
- Ultra-precise machining
- Variations
-
- Model No.PGM-30V
- Product name
- Regulator for process gas
- Flow rate
- 20ℓ/min
- Secondary set pressure
- -0.07 to 0.21MPa
- Remarks
- Model No.PGM-30
- Product name
- Regulator for process gas
- Flow rate
- 20ℓ/min
- Secondary set pressure
- 0 to 0.21MPa
- Remarks
- Model No.PGM-50
- Product name
- Regulator for process gas
- Flow rate
- 20ℓ/min
- Secondary set pressure
- 0 to 0.35MPa
- Remarks
- Model No.PGM-100
- Product name
- Regulator for process gas
- Flow rate
- 20ℓ/min
- Secondary set pressure
- 0 to 0.7MPa
- Remarks
- Model No.PGM-H-60
- Product name
- Regulator for process gas
- Flow rate
- 50ℓ/min
- Secondary set pressure
- 0 to 0.42MPa
- Remarks
- Model No.PGM-H-100
- Product name
- Regulator for process gas
- Flow rate
- 50ℓ/min
- Secondary set pressure
- 0 to 0.7MPa
- Remarks
- Model No.PGM-2H-30V
- Product name
- Regulator for process gas
- Flow rate
- 200L/min
- Secondary set pressure
- -0.07 to 0.21Mpa
- Remarks
- Model No.PGM-2H-30
- Product name
- Regulator for process gas
- Flow rate
- 200L/min
- Secondary set pressure
- 0 to 0.21Mpa
- Remarks
- Model No.PGM-2H-60
- Product name
- Regulator for process gas
- Flow rate
- 200L/min
- Secondary set pressure
- 0 to 0.42Mpa
- Remarks
- Model No.PGM-2H-100
- Product name
- Regulator for process gas
- Flow rate
- 200L/min
- Secondary set pressure
- 0 to 0.7Mpa
- Remarks