Product Details
Budding products
Electric Actuator Motorless Specification Slider 【Special specifications】
- Model No.
- EFS
NEW
- Industry
- Inspection
- Handling
- Implementation
- Conveyance
- Semiconductor manufacturing process (post-process)
Thin, lightweight electric actuator. Contributes to the downsizing and weight reduction of equipment. The black body color reduces light reflection during image inspections.

- Documents / Download
PDF Catalog
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- Features
[Ideal for Image Inspection Processes]
A black body color is used as standard. Suppressing light reflection improves stability during image inspections.
The steel belt can also be changed to black as an option.[Ideal for the Z-axis of Orthogonal Axis Systems]
Compared to conventional products, this model is thinner and lighter. Body height has been reduced by up to 33% and body weight by approximately 30%.
Allows for optimization of multi-axis combinations.[Long Stroke Compatibility]
Despite its thin body, the supported stroke has been expanded compared to conventional low profiles.
- Variations
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- Model No.EFS-05
- Product name
- Slider type【Special specifications】
- Max. payload
- 30 kg (horizontal) 10 kg (vertical)
- Max. stroke
- 1,000㎜
- Repeatability
- ±0.01㎜
- Remarks
- Model No.EFS-08
- Product name
- Slider type【Special specifications】
- Max. payload
- 30 kg (horizontal) 10 kg (vertical)
- Max. stroke
- 1,250㎜
- Repeatability
- ±0.01㎜
- Remarks