Product Details
Budding products
Electric Actuator Motorless Specification Slider 【Special specifications】
- Model No.
- EFS
NEW
- Industry
- Inspection
- Handling
- Implementation
- Conveyance
- Semiconductor manufacturing process (post-process)
Thin, lightweight electric actuator. Contributes to the downsizing and weight reduction of equipment. The black body color reduces light reflection during image inspections.
You can download 3DCAD data from "2DCAD" on Documents / Download.

- Documents / Download
PDF Catalog
CKD plus Members Only
- Features
[Ideal for Image Inspection Processes]
A black body color is used as standard. Suppressing light reflection improves stability during image inspections.
The steel belt can also be changed to black as an option.[Ideal for the Z-axis of Orthogonal Axis Systems]
Compared to conventional products, this model is thinner and lighter. Body height has been reduced by up to 33% and body weight by approximately 30%.
Allows for optimization of multi-axis combinations.[Long Stroke Compatibility]
Despite its thin body, the supported stroke has been expanded compared to conventional low profiles.
- Variations
-
- Model No.EFS-05
- Product name
- Slider type【Special specifications】
- Max. payload
- 30 kg (horizontal) 10 kg (vertical)
- Max. stroke
- 1,000㎜
- Repeatability
- ±0.01㎜
- Remarks
- Model No.EFS-08
- Product name
- Slider type【Special specifications】
- Max. payload
- 30 kg (horizontal) 10 kg (vertical)
- Max. stroke
- 1,250㎜
- Repeatability
- ±0.01㎜
- Remarks