Product Details
Pilot operated 3-port valves
3-port pilot operated valve
- Model No.
- 3GD/ER
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
3-port valve with improved environmental performance, safety, reliability, and ease of use. High-function.
[Cylinder bore size: φ20 to φ100]
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
- Features
[Environmental performance]
Continuous energization is made possible by adopting a new coil actuator.
Reduced power consumption is also achieved. (0.35 W, 0.1 W / low exoergic / energy type]
[Ease of use]
Wiring connector can be moved freely upwards and sideways.
As the D sub-connector is also a rotary type, it can be moved freely upwards and sideways.
- Variations
-
- Model No.3GD※R
- Product name
- 3-port single unit valve
- Piping port position
- Body piping
- Port size
- Φ4, Φ6, Φ8, Φ10, M5, Rc1/8, 1/4
- Remarks
- Model No.3GE※R
- Product name
- 3-port single unit valve
- Piping port position
- Base piping
- Port size
- Rc1/8, 1/4
- Remarks