Product Details
Flow sensors / controllers
Miniature flow rate sensor for gas RAPIFLOW®
- Model No.
- FSM
Discontinued some variations
- Industry
- Semiconductor manufacturing process (post-process)
Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the like thanks to its light weight and high-speed response.
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
- Features
[Miniature/lightweight] (FSM-X Series)
Compact body enabled by separating the sensor head.
Reduced volume by 52% compared to conventional products, light weight of 4 g and ultra-thin 8 mm are realized.
It is available as sensor head only and with flow path block.
[Non-linear characteristics] (FSM-X Series)
Since the analog output has non-linear characteristics, the resolution in low flow rate range is improved.
[High-speed response] (FSM-V / FSM-X Series)
5 ms high-speed response has made possible a design once abandoned[Bi-directional measurement] (FSM-V / FSM-X Series)
Bidirectional measurement is possible, making it ideal for suction confirmation.
- Variations
-
- Model No.FSM-H
- Product name
- Fine flow rate
- Port size (φ, M)
- Rc1/8, G1/8
- Remarks
- Model No.FSM-V
- Product name
- Flow rate sensor [linear]
- Port size (φ, M)
- 1.8,4,5
- Remarks
- Model No.FSM-VFM
- Product name
- Inline filter dedicated for FSM/FSM-V
- Port size (φ, M)
- -
- Remarks
- Model No.FSM-V-D
- Product name
- Display
- Port size (φ, M)
- -
- Remarks
- Model No.FSM-X
- Product name
- Flow rate switch [non-linear]
- Port size (φ, M)
- 4,5
- Remarks
- Model No.FSM-A
- Product name
- Analog output 1 point
- Port size (φ, M)
- Remarks
- Discontinued
2009 03 31【Discontinued model】
Alternative model : FSM2 Series
- Model No.FSM-N
- Product name
- Switch output NPN 2 points, analog output 1 point
- Port size (φ, M)
- Remarks
- Discontinued
2009 03 31【Discontinued model】
Alternative model : FSM2 Series
- Model No.FSM-P
- Product name
- Switch output PNP 2 points, analog output 1 point
- Port size (φ, M)
- Remarks
- Discontinued
2009 03 31【Discontinued model】
Alternative model : FSM2 Series