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Siloxane/Ozone Remover
- Model No.
- SFX
NEW
- Industry
- Semiconductor manufacturing process (post-process)
- Implementation
This remover is dedicated for the adsorption of siloxane and the decomposition of ozone.
With a high removal rate of 99%, compressed air and nitrogen gas can be used under pressurize.
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
- Features
[Target removal substances]
Either siloxane or ozone can be removed with a single model.
[Operating fluid]
Can be used with compressed air or nitrogen gas while in a pressurized state.
[Removal rate]
Achieves high removal performance of 99% or more with our original activated carbon filter.
[Two size variations]
Selectable from two types, standard and high flow rate, depending on the application.
[Space saving]
Modular connection with our air preparation components realize space savings.
- Variations
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- Model No.SFX40-8
- Product name
- Siloxane/Ozone Remover
- Bore size
- Rc1/4
- Maximum processing flow rate（Siloxane） ※At a primary pressure of 0.7 Mpa
- 700L/min（ANR）
- Maximum processing flow rate（Ozone） ※At a primary pressure of 0.7 Mpa
- 560L/min（ANR）
- Remarks
- Model No.SFX40-10
- Product name
- Siloxane/Ozone Remover
- Bore size
- Rc3/8
- Maximum processing flow rate（Siloxane） ※At a primary pressure of 0.7 Mpa
- 700L/min（ANR）
- Maximum processing flow rate（Ozone） ※At a primary pressure of 0.7 Mpa
- 560L/min（ANR）
- Remarks
- Model No.SFX40-15
- Product name
- Siloxane/Ozone Remover
- Bore size
- Rc1/2
- Maximum processing flow rate（Siloxane） ※At a primary pressure of 0.7 Mpa
- 700L/min（ANR）
- Maximum processing flow rate（Ozone） ※At a primary pressure of 0.7 Mpa
- 560L/min（ANR）
- Remarks
- Model No.SFX90-50
- Product name
- Siloxane/Ozone Remover
- Bore size
- Rc2
- Maximum processing flow rate（Siloxane） ※At a primary pressure of 0.7 Mpa
- 6300L/min（ANR）
- Maximum processing flow rate（Ozone） ※At a primary pressure of 0.7 Mpa
- 5000L/min（ANR）
- Remarks