Product Details
Flow sensors / controllers
Pneumatic flow rate sensor (integrated display FLUEREX)
- Model No.
 - PF・PFU
 
Discontinued 2019 03 31
- Industry
 - Sensor
 - Semiconductor manufacturing process (post-process)
 
【Discontinued model】
Alternative model : PFD Series
Pneumatic flow rate sensor for medium / large flow rate that’s very useful in grasping the current situation and confirming the effect of energy.

- Documents / Download
 PDF Catalog
CKD plus Members Only
- Features
 [Broad flow rate range]
[PF-F Series]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min
200 to 4000 ℓ/min
0.4 to 8 ㎥
0.8 to 16 ㎥
[PFU Series]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min[Integrating function provided as standard]
The air consumption of equipment can be easily measured.[Space saving] (PF-U Series)
Module connection to filter / regulator is possible.
- Variations
 - 
- Model No.PF500F
 - Product name
 - Flow rate sensor for compressed air (Medium flow rate)
 
- Flow rate range (L/min)
 - 25 to 500
 
- Port size
 - Rc3/8, Rc1/2
 
- Remarks
 - Discontinued
2019 03 31Old Catalog 
- Model No.PF2000F
 - Product name
 - Flow rate sensor for compressed air (Medium flow rate)
 
- Flow rate range (L/min)
 - 100 to 2000
 
- Port size
 - Rc1/2, Rc3/4
 
- Remarks
 - Discontinued
2019 03 31Old Catalog 
- Model No.PF4000F
 - Product name
 - Flow rate sensor for compressed air (Medium flow rate)
 
- Flow rate range (L/min)
 - 200 to 4000
 
- Port size
 - Rc3/4, Rc1
 
- Remarks
 - Discontinued
2019 03 31Old Catalog 
- Model No.PF8000F
 - Product name
 - Flow rate sensor for compressed air (Large flow rate)
 
- Flow rate range (L/min)
 - 0.40 to 8.00㎥/min(normal)
 
- Port size
 - Rc1 1/2
 
- Remarks
 - Discontinued
2019 03 31Old Catalog 
- Model No.PF16000F
 - Product name
 - Flow rate sensor for compressed air (Large flow rate)
 
- Flow rate range (L/min)
 - 0.80 to 16.00㎥/min(normal)
 
- Port size
 - Rc2
 
- Remarks
 - Discontinued
2019 03 31Old Catalog 
- Model No.PFU500F
 - Product name
 - Flow rate sensor for compressed air Module type
 
- Flow rate range (L/min)
 - 25 to 500
 
- Port size
 - Rc3/8
 
- Remarks
 - Discontinued
2019 03 31Old Catalog 
- Model No.PFU1000F
 - Product name
 - Flow rate sensor for compressed air modular connection type
 
- Flow rate range (L/min)
 - 50 to 1000
 
- Port size
 - Rc3/8
 
- Remarks
 - Discontinued
2019 03 31Old Catalog 
- Model No.PFU2000F
 - Product name
 - Flow rate sensor for compressed air modular connection type
 
- Flow rate range (L/min)
 - 100 to 2000
 
- Port size
 - Rc1/2
 
- Remarks
 - Discontinued
2019 03 31Old Catalog 
- Model No.PF1000F
 - Product name
 - Flow rate sensor for compressed air (Medium flow rate)
 
- Flow rate range (L/min)
 - 50 to 1000
 
- Port size
 - Rc3/8, Rc1/2
 
- Remarks
 - Discontinued
2006 11 30Old Catalog 
- Model No.PF500D
 - Product name
 - Flow rate sensor for compressed air
 
- Flow rate range (L/min)
 - 25 to 500
 
- Port size
 - Rc3/8, Rc1/2
 
- Remarks
 - Discontinued
2006 11 30Old Catalog 
- Model No.PF1000D
 - Product name
 - Flow rate sensor for compressed air
 
- Flow rate range (L/min)
 - 50 to 1000
 
- Port size
 - Rc3/8, Rc1/2
 
- Remarks
 - Discontinued
2006 11 30Old Catalog 
- Model No.PF2000D
 - Product name
 - Flow rate sensor for compressed air
 
- Flow rate range (L/min)
 - 100 to 2000
 
- Port size
 - Rc3/8, Rc1/2
 
- Remarks
 - Discontinued
2006 11 30Old Catalog 
- Model No.PF4000D
 - Product name
 - Flow rate sensor for compressed air
 
- Flow rate range (L/min)
 - 200 to 4000
 
- Port size
 - Rc1/2, Rc1
 
- Remarks
 - Discontinued
2006 11 30Old Catalog 
- Model No.PF8000D
 - Product name
 - Flow rate sensor for compressed air
 
- Flow rate range (L/min)
 - 400 to 8000
 
- Port size
 - Rc1, Rc1 1/2
 
- Remarks
 - Discontinued
2006 11 30Old Catalog 
- Model No.PF16000E
 - Product name
 - Flow rate sensor for compressed air
 
- Flow rate range (L/min)
 - 800 to 16000
 
- Port size
 - Rc2
 
- Remarks
 - Discontinued
2006 11 30Old Catalog