Product Details
Flow sensors / controllers
Pneumatic flow rate sensor (integrated display FLUEREX)
- Model No.
- PF・PFU
Discontinued 2019 03 31
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
【Discontinued model】
Alternative model : PFD Series
Pneumatic flow rate sensor for medium / large flow rate that’s very useful in grasping the current situation and confirming the effect of energy.

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PDF Catalog
CKD plus Members Only
- Features
[Broad flow rate range]
[PF-F Series]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min
200 to 4000 ℓ/min
0.4 to 8 ㎥
0.8 to 16 ㎥
[PFU Series]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min[Integrating function provided as standard]
The air consumption of equipment can be easily measured.[Space saving] (PF-U Series)
Module connection to filter / regulator is possible.
- Variations
-
- Model No.PF500F
- Product name
- Flow rate sensor for compressed air (Medium flow rate)
- Flow rate range (L/min)
- 25 to 500
- Port size
- Rc3/8, Rc1/2
- Remarks
- Discontinued
2019 03 31Old Catalog
- Model No.PF2000F
- Product name
- Flow rate sensor for compressed air (Medium flow rate)
- Flow rate range (L/min)
- 100 to 2000
- Port size
- Rc1/2, Rc3/4
- Remarks
- Discontinued
2019 03 31Old Catalog
- Model No.PF4000F
- Product name
- Flow rate sensor for compressed air (Medium flow rate)
- Flow rate range (L/min)
- 200 to 4000
- Port size
- Rc3/4, Rc1
- Remarks
- Discontinued
2019 03 31Old Catalog
- Model No.PF8000F
- Product name
- Flow rate sensor for compressed air (Large flow rate)
- Flow rate range (L/min)
- 0.40 to 8.00㎥/min(normal)
- Port size
- Rc1 1/2
- Remarks
- Discontinued
2019 03 31Old Catalog
- Model No.PF16000F
- Product name
- Flow rate sensor for compressed air (Large flow rate)
- Flow rate range (L/min)
- 0.80 to 16.00㎥/min(normal)
- Port size
- Rc2
- Remarks
- Discontinued
2019 03 31Old Catalog
- Model No.PFU500F
- Product name
- Flow rate sensor for compressed air Module type
- Flow rate range (L/min)
- 25 to 500
- Port size
- Rc3/8
- Remarks
- Discontinued
2019 03 31Old Catalog
- Model No.PFU1000F
- Product name
- Flow rate sensor for compressed air modular connection type
- Flow rate range (L/min)
- 50 to 1000
- Port size
- Rc3/8
- Remarks
- Discontinued
2019 03 31Old Catalog
- Model No.PFU2000F
- Product name
- Flow rate sensor for compressed air modular connection type
- Flow rate range (L/min)
- 100 to 2000
- Port size
- Rc1/2
- Remarks
- Discontinued
2019 03 31Old Catalog
- Model No.PF1000F
- Product name
- Flow rate sensor for compressed air (Medium flow rate)
- Flow rate range (L/min)
- 50 to 1000
- Port size
- Rc3/8, Rc1/2
- Remarks
- Discontinued
2006 11 30Old Catalog
- Model No.PF500D
- Product name
- Flow rate sensor for compressed air
- Flow rate range (L/min)
- 25 to 500
- Port size
- Rc3/8, Rc1/2
- Remarks
- Discontinued
2006 11 30Old Catalog
- Model No.PF1000D
- Product name
- Flow rate sensor for compressed air
- Flow rate range (L/min)
- 50 to 1000
- Port size
- Rc3/8, Rc1/2
- Remarks
- Discontinued
2006 11 30Old Catalog
- Model No.PF2000D
- Product name
- Flow rate sensor for compressed air
- Flow rate range (L/min)
- 100 to 2000
- Port size
- Rc3/8, Rc1/2
- Remarks
- Discontinued
2006 11 30Old Catalog
- Model No.PF4000D
- Product name
- Flow rate sensor for compressed air
- Flow rate range (L/min)
- 200 to 4000
- Port size
- Rc1/2, Rc1
- Remarks
- Discontinued
2006 11 30Old Catalog
- Model No.PF8000D
- Product name
- Flow rate sensor for compressed air
- Flow rate range (L/min)
- 400 to 8000
- Port size
- Rc1, Rc1 1/2
- Remarks
- Discontinued
2006 11 30Old Catalog
- Model No.PF16000E
- Product name
- Flow rate sensor for compressed air
- Flow rate range (L/min)
- 800 to 16000
- Port size
- Rc2
- Remarks
- Discontinued
2006 11 30Old Catalog