Product Details
Flow sensors / controllers
Flow sensor for compressed air (Display separated FLUEREX)
- Model No.
- PFD
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.

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PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
- Features
[Broad flow rate range]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min
200 to 4000 ℓ/min
400 to 8000 ℓ/min
800 to 16000 ℓ/min
0.8 to 16 m3/min[Accumulated flow calculation function]
Since integrated display and integrated pulse output are possible, it is ideal for measuring the consumption flow rate of equipment.
- Variations
-
- Model No.PFD-501
- Product name
- Flow sensor for compressed air (Display separated type)
- Flow rate range (L/min)
- 25 to 500
- Port size (Rc)
- 3/8
- Remarks
- Model No.PFD-102
- Product name
- Flow sensor for compressed air
- Flow rate range (L/min)
- 50 to 1000
- Port size (Rc)
- 1/2
- Remarks
- Model No.PFD-202
- Product name
- Flow sensor for compressed air
- Flow rate range (L/min)
- 100 to 2000
- Port size (Rc)
- 3/4
- Remarks
- Model No.PFD-402
- Product name
- Flow sensor for compressed air
- Flow rate range (L/min)
- 200 to 4000
- Port size (Rc)
- 1
- Remarks
- Model No.PFD-802
- Product name
- Flow sensor for compressed air
- Flow rate range (L/min)
- 400 to 8000
- Port size (Rc)
- 1 1/2
- Remarks
- Model No.PFD-163
- Product name
- Flow sensor for compressed air
- Flow rate range (L/min)
- 800 to 16000
- Port size (Rc)
- 2
- Remarks