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Product Details

Flow sensors / controllers

Flow sensor for compressed air (Display separated FLUEREX)

Model No.
PFD
Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)

Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.

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Features

[Broad flow rate range]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min
200 to 4000 ℓ/min
400 to 8000 ℓ/min
800 to 16000 ℓ/min
0.8 to 16 m3/min

[Accumulated flow calculation function]
Since integrated display and integrated pulse output are possible, it is ideal for measuring the consumption flow rate of equipment.

Variations
Model No.PFD-501
Product name
Flow sensor for compressed air (Display separated type)
Flow rate range (L/min)
25 to 500
Port size (Rc)
3/8
Remarks
Model No.PFD-102
Product name
Flow sensor for compressed air
Flow rate range (L/min)
50 to 1000
Port size (Rc)
1/2
Remarks
Model No.PFD-202
Product name
Flow sensor for compressed air
Flow rate range (L/min)
100 to 2000
Port size (Rc)
3/4
Remarks
Model No.PFD-402
Product name
Flow sensor for compressed air
Flow rate range (L/min)
200 to 4000
Port size (Rc)
1
Remarks
Model No.PFD-802
Product name
Flow sensor for compressed air
Flow rate range (L/min)
400 to 8000
Port size (Rc)
1 1/2
Remarks
Model No.PFD-163
Product name
Flow sensor for compressed air
Flow rate range (L/min)
800 to 16000
Port size (Rc)
2
Remarks

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