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Flow sensors / controllers

P5* / P7* Series for Cleanrooms Compact Flow Rate Sensor RAPIFLOW®

Model No.
FSM3-P70・FSM3-P80

NEW

P5* / P7* Series for cleanrooms

Industry
  • Semiconductor manufacturing process (post-process)

【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.

P70 : Prevent dust generation
P80 : Oil prohibited

Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

User's Manual

CKD plus Members Only

Features

【NEW】 Environment-resistant specifications (IP65) added
Added IP65 protection structure that can be used safely even if water is utilized in the environment with dust, during maintenance and cleaning.
As an option, the European Explosion-Proof Directive (ATEX) compliant type is also available.

[Clean-room specifications P70 / P80]
You can select as needed.
P70 (anti-dust generation) : Product surface is degreased and cleaned before packaging, and heat-sealed into an antistatic bag on a clean bench (Class 1000 or more).
P80 (oil-prohibited) : In addition to the above P70 specifications, wetted sections are degreased and cleaned.

【Stainless Steel Body】
NEW : Flow rate range: expanded to 1000ℓ.
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
Two types of fittings and screw-in types can be selected: JXR fittings, double barbed fitting.
The integrated needle type further contributes to space savings.

【Resin Body】
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
Models dedicated to oxygen are also available (oil prohibited).
Four fittings can be selected: push-in elbow and straight fittings, screw-in elbow and straight fittings.
2-port valves can be connected directly, contributing to further space savings.
The integrated needle type further contributes to space savings.

【High Precision/High Responsivity】
By the redesigning of the circuitry, a reduction of up to 50% in pressure loss has been achieved compared with conventional products.
The flow direction can be arbitrarily set from 3 directions, forward, bidirectional and reverse.
Response time: 50msec.

【IO-Link will Automate your Entire Factory】
With compatibility to IO-Link, the transmission of the parameters and event data will make Preventative Maintenance possible.
Ideal for leak inspection and air consumption control.

Variations
Model No.FSM3-L-P70・FSM3-L-P80
Product name
Liquid crystal display(for cleanrooms)
Remarks
Model No.FSM3-B-P70・FSM3-B-P80
Product name
Bar display(for cleanrooms)
Remarks
Model No.FSM3-C-P70・FSM3-C-P80
Product name
IO-Link type(for cleanrooms)
Remarks
Model No.FSM3-L※4/5-P70・FSM3-L※4/5-P80
Product name
Liquid crystal display
Remarks
Environment-resistant specifications
Model No.FSM3-B※4/5-P70・FSM3-B※4/5-P80
Product name
Bar display
Remarks
Environment-resistant specifications

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