Direct acting universal pressurized 3-port valves usable with a working pressure of 0.7 MPa to low vacuum. Contributes t…

Industry

Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
a…

Industry

• Semiconductor manufacturing process (pre-process)
• Semiconductor manufacturing process (post-process)
• Oxygen concentrator
• Dialysis monitoring equipment
• Dental equipment

Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and e…

Industry

• Semiconductor manufacturing process (pre-process)
• Components for chemical liquid supply facilities
• Components for chemical gas supply facilities
• N2 purging related products

Vacuum suction unit that does not use a vacuum burst valve, utilizing 3QR Series‘ large flow rate and high responsivity.…

Industry

• Implementation

Super compact direct acting poppet valve with a width of 10 mm which supports miniaturization of devices. Single unit an…

Industry

Direct acting universal pressurized 3-port valves usable with a working pressure of 0.7 MPa to low vacuum. Contributes t…

Industry

• Oxygen concentrator
• Respiratory / Anesthesia device

Handles compact 3-port valve applications across the board. (Air operated valve, cylinder drive, suction transport, air …

Industry

【Discontinued model】

Industry