Product Details
Flow sensors / controllers
Compact Flow Rate Sensor RAPIFLOW®
- Model No.
- FSM3
【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
- Industry
- Shield gas
- Semiconductor manufacturing process (post-process)
- N2 purging related products

- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Technical Data
CKD plus Members Only
Model No. | Product name | Remarks |
---|---|---|
FSM3-L | Liquid crystal display | |
FSM3-B | Bar display | |
FSM3-C | IO-Link type | |
FSM3-L※4/5 | Liquid crystal display | Environment-resistant specifications |
FSM3-B※4/5 | Bar display | Environment-resistant specifications |
FSM2-D | Separated display |
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