Product Details

Flow sensors / controllers

Compact Flow Rate Sensor RAPIFLOW®

Model No.
FSM3

【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.

Industry
  • Shield gas
  • Semiconductor manufacturing process (post-process)
  • N2 purging related products
  • Features
  • Variations
Model No. Product name Remarks
FSM3-LLiquid crystal display
FSM3-BBar display
FSM3-CIO-Link type
FSM3-L※4/5Liquid crystal displayEnvironment-resistant specifications
FSM3-B※4/5Bar displayEnvironment-resistant specifications
FSM2-DSeparated display

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