Product Details
Flow sensors / controllers
Compact Flow Rate Sensor RAPIFLOW®
- Model No.
- FSM3
【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
- Industry
- Shield gas
- Semiconductor manufacturing process (post-process)
- N2 purging related products

- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Technical Data
CKD plus Members Only
【NEW】 Environment-resistant specifications (IP65) added
Added IP65 protection structure that can be used safely even if water is utilized in the environment with dust, during maintenance and cleaning.
As an option, the European Explosion-Proof Directive (ATEX) compliant type is also available.

【Stainless Steel Body】
NEW : Flow rate range: expanded to 1000ℓ.
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
Two types of fittings and screw-in types can be selected: JXR fittings, double barbed fitting.
The integrated needle type further contributes to space savings.

【Resin Body】
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
Models dedicated to oxygen are also available (oil prohibited).
Four fittings can be selected: push-in elbow and straight fittings, screw-in elbow and straight fittings.
2-port valves can be connected directly, contributing to further space savings.
The integrated needle type further contributes to space savings.

【High Precision/High Responsivity】
By the redesigning of the circuitry, a reduction of up to 50% in pressure loss has been achieved compared with conventional products.
The flow direction can be arbitrarily set from 3 directions, forward, bidirectional and reverse.
Response time: 50msec.

【IO-Link will Automate your Entire Factory】
With compatibility to IO-Link, the transmission of the parameters and event data will make Preventative Maintenance possible.
Ideal for leak inspection and air consumption control.

【Start the sample kit lend in Japan】
You can check the flow rate range before purchase.

Model No. | Product name | Remarks |
---|---|---|
FSM3-L | Liquid crystal display | |
FSM3-B | Bar display | |
FSM3-C | IO-Link type | |
FSM3-L※4/5 | Liquid crystal display | Environment-resistant specifications |
FSM3-B※4/5 | Bar display | Environment-resistant specifications |
FSM2-D | Separated display |
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