Product Details

Flow sensors / controllers

Compact Flow Rate Sensor Rapiflow(R)

Model No.
FSM3

NEW

With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.

Industry
  • Shield gas
  • Semiconductor manufacturing process (post-process)
  • N2 purging related products

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  • Features
  • Variations

【Stainless Steel Body】
NEW : Flow rate range: expanded to 1000ℓ.
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
Two types of fittings and screw-in types can be selected: JXR fittings, double barbed fitting.
The integrated needle type further contributes to space savings.

【Resin Body】
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
Models dedicated to oxygen are also available (oil prohibited).
Four fittings can be selected: push-in elbow and straight fittings, screw-in elbow and straight fittings.
2-port valves can be connected directly, contributing to further space savings.
The integrated needle type further contributes to space savings.

【High Precision/High Responsivity】
By the redesigning of the circuitry, a reduction of up to 50% in pressure loss has been achieved compared with conventional products.
The flow direction can be arbitrarily set from 3 directions, forward, bidirectional and reverse.
Response time: 50msec.

【IO-Link will Automate your Entire Factory】
With compatibility to IO-Link, the transmission of the parameters and event data will make Preventative Maintenance possible.
Ideal for leak inspection and air consumption control.

【Start the sample kit lend in Japan】
You can check the flow rate range before purchase.

Model No. Product name Remarks
FSM3-LLiquid crystal display
FSM3-BBar display
FSM3-CIO-Link type

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