Product Details
Vacuum-related products
Compact vacuum regulator
- Model No.
- VSRVV
Discontinued some variations
Push-lock compact vacuum regulator.
- Industry
- Conveyance
- Assembly
- Handling
- Inspection
- Implementation
- Semiconductor manufacturing process (post-process)
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PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
[One-push lock]
Pressure adjustments can be easily made with one hand. Locking is done with a single push.
[50% lighter]
The body is made of resin and the metal materials are made of aluminum. Up to 50% lighter than conventional CKD products.
[Copper not used]
SUS and aluminum alloy are used in flow path parts, making it ideal for applications susceptible to copper ions.
[Ozone-resistant materials are used as standard]
Special NBR has been adopted. Ozone-resistant materials are used as standard for the valve and diaphragm parts to prevent deterioration.
Model No. | Product name | Remarks |
---|---|---|
VSRVV-※Z | Push locking type | |
VSRVV | Pressure adjustment screw・Lock nut type | Discontinued 2022 10 31Old Catalog |
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