Product Details

Vacuum-related products

Compact vacuum regulator

Model No.
VSRVV

NEW

Push-lock compact vacuum regulator.

Industry
  • Conveyance
  • Assembly
  • Handling
  • Inspection
  • Implementation
  • Semiconductor manufacturing process (post-process)

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3D CAD

CKD plus Members Only

  • Features
  • Variations

[One-push lock]
Pressure adjustments can be easily made with one hand. Locking is done with a single push.

[50% lighter]
The body is made of resin and the metal materials are made of aluminum. Up to 50% lighter than conventional CKD products.

[Copper not used]
SUS and aluminum alloy are used in flow path parts, making it ideal for applications susceptible to copper ions.

[Ozone-resistant materials are used as standard]
Special NBR has been adopted. Ozone-resistant materials are used as standard for the valve and diaphragm parts to prevent deterioration.

Model No. Product name Remarks
VSRVV-※ZPush locking type
VSRVVPressure adjustment screw・Lock nut typeDiscontinued
2022 10 31
Old Catalog

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