Product Details

Flow sensors / controllers

P5* / P7* Series for small size flow rate sensor RAPIFLOW Miniature inline filter

Model No.
FSM-VFM

P5* / P7* Series for cleanrooms

Miniature flow sensor for compressed air and nitrogen gas. Due to the small inner volume, the high-speed response at suction confirmation is not affected.
P70 : Prevent dust generation

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  • Features
  • Variations

[High-speed response]
5 ms high-speed response has made possible a design once abandoned

[Bi-directional measurement]
Bidirectional measurement is possible, making it ideal for suction confirmation.

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