Product Details

Flow sensors / controllers

P5* / P7* Series for Cleanrooms Compact flow rate sensor for gas RAPIFLOW®

Model No.
FSM2

Discontinued some variations

P5* / P7* Series for cleanrooms

【Discontinued model】
Alternative model : FSM3 Series
*Separated display FSM2-D Series is still on sale.

A small flow sensor for gas with 2-screen 2-color display. It offers two types: integrated and separated display.
P70 : Prevent dust generation
P80 : Oil prohibited

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  • Features
  • Variations

[Compact even with large flow rate]
Flow rate range: 0.5 to 1,000 ℓ/min
With the 500 and 1000 ℓ/min types, the body size has been reduced by 30% compared to conventional models, attaining high downsizing.

[Straight piping section not required]
As a rectifier mechanism is built in, straight piping sections are not required at either the upstream or downstream sides, allowing it to be installed anywhere.

[Bi-directional measurement]
The flow direction can be randomly set for measurement with the display integrated bi-directional type.

[High-speed response]
The platinum sensor chip manufactured with silicon micromachining realizes the response time of 50 m/sec.

[Clean-room specifications]
P70 (anti-dust generation) and P80 (oil-prohibited specifications) are available as standard.
Perfect for semiconductor and liquid crystal manufacturing applications.

Model No. Product name Flow rate range (L/min)Port size (φ, Rc) Remarks
FSM2-ADisplay separated (for cleanrooms) 0.5 to 10004 to 10, 1/8, 1/4, 1/2Discontinued
2022 01 31
FSM2-NDisplay integrated (switch output NPN 2 points, analog output 1 point) (for cleanrooms) 0.5 to 10004 to 10, 1/8, 1/4, 1/2Discontinued
2022 01 31
FSM2-PDisplay integrated (switch output PNP 2 points, analog output 1 point) (for cleanrooms) 0.5 to 10004 to 10, 1/8, 1/4, 1/2Discontinued
2022 01 31
FSM2-DSeparated display (for cleanrooms)

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