Product Details
Electro pneumatic regulators
P5* / P7* Series for Cleanrooms Thin electro pneumatic regulator
- Model No.
- MEVT
P5* / P7* Series for cleanrooms
Thin, compact electro-pneumatic regulator with reduced wiring.
Ideal for pressure control and fine speed cylinder control in semiconductor and precise processing fields.
P70 : Exhausted treatment
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[14 mm thin and 80 g lightweight]
With this high integration type, up to 24 manifold stations can be used.
[Supports reduced wiring]
Supports serial transmission (DeviceNet, CC-Link), centralized terminal block, D sub-connector.
[2 mounting directions]
It can be mounted in two directions, bottom and back.
[High precision / high-speed response]
Repeatability: 0.3% F.S.
Response time: 0.1 sec (no load)
| Model No. | Product name | Pressure control range (MPa) | Port size (φ) | Remarks |
|---|---|---|---|---|
| EVT-P70 | Single unit (for cleanrooms) | 0 to 0.1 | 4, 6 | |
| MEVT-P70 | Manifold (for cleanrooms) | 0 to 0.5 | 4, 6 |
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