Product Details
Regulators
P5* / P7* Series for Cleanrooms Clean regulator
- Model No.
- RC2000
P5* / P7* Series for cleanrooms
With oil-prohibited specifications and a stainless steel body, it is ideal for controlling the pressure of clean air and N2 used in semiconductor and liquid crystal manufacturing equipment. The compact body and large flow rate capacity are suitable for air (N2) blowing.
P90 : Oil prohibited, Stainless steel used
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Safety Precautions
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[Oil-prohibited specifications]
Precision cleaning is performed on the gas contact parts, and the manufacturing processes from assembling to packaging are completed in clean rooms.
No grease is used in gas-contacting parts.
[Large flow rate / compact body]
A large flow rate of 0.8 ㎥/min. is realized even with just a 50 mm double-sided interface.
(Flow rate at 0.7 MPa primary pressure, 0.5 MPa set pressure, 0.1 MPa pressure drop)
[With reverse function]
This function reverses secondary pressure to the primary side when primary pressure is exhausted.
Safety-oriented, with no residual pressure on the secondary side. (When back pressure is not applied)
| Model No. | Product name | Port size (Rc) | Max. working pressure (MPa) | Remarks |
|---|---|---|---|---|
| RC2000-8-P90 | Clean regulator (for cleanrooms) | 1/4 | Standard: 0.05 to 0.7, low pressure: 0.02 to 0.2 | |
| RC2000-10-P90 | Clean regulator (for cleanrooms) | 3/8 | Standard: 0.05 to 0.7, low pressure: 0.02 to 0.2 | |
| RC2000-15-P90 | Clean regulator Custom order (for cleanrooms) | 1/2 | Standard: 0.05 to 0.7, low pressure: 0.02 to 0.2 |
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