Product Details

Regulators

P5* / P7* Series for Cleanrooms Precision regulator

Model No.
RP1000・RP2000

P5* / P7* Series for cleanrooms

A compact type with a large relief flow rate that demonstrates highly precise pressure control and stable flow characteristics with low pressure drop.
P70 : Exhaust treatment

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  • Features
  • Variations

[Excellent micro pressure/low pressure range performance] (RP1000 Series)
Uses pilot pressure control method with nozzle and flapper.
Enables highly accurate and stable precision pressure control within the set pressure range of 0.003 to 0.4 MPa.
Particularly ideal for control performance within the low pressure range of 0.03 to 0.1 MPa.
Compact size of □42 mm, yet boasts high relief flow rate.

[Stable flow characteristics] (RP1000 Series)
Stable flow characteristics with minimal pressure drop.
High repeatability regardless of the flow rate.
Within ±0.5% of full scale.
Within 0.1% of sensitivity full scale.

[Long service life and large flow rate ideal for balancer] (RP2000 Series)
Achieves high performance / long service life/large exhaust flow rate.
Enables precise pressure control within the pressure range of 0.03 to 0.85 MPa.
Repeatability: Within ±0.5% of full scale, sensitivity: Within 0.2% of full scale regardless of the flow rate.

[Large relief flow rate] (RP2000 Series)
Pilot pressure control method with nozzle and flapper.
Large exhaust flow rate with large relief volume while compact at □50 mm.
Low-sliding packing is used for the moving part to achieve a long service life.
It provides excellent durability at high frequency and high response, ideal for devices such as balancers, as well as sufficient supply/discharge volume.

Model No. Product name Port size (Rc)Set pressure (MPa)For clean room Remarks
RP1000-8-02Precision regulator (for cleanrooms)1/40.003 to 0.2P70
RP1000-8-04Precision regulator (for cleanrooms)1/40.005 to 0.4P70
RP1000-8-07Precision regulator (for cleanrooms)1/40.005 to 0.7P70
RP2000-8-08Precision regulator (for cleanrooms)1/40.03 to 0.85P70
RP2000-10-08Precision regulator (for cleanrooms)3/80.03 to 0.85P70

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