Product Details
Flow sensors / controllers
P4* Series for Rechargeable battery manufacturing processes Compact flow rate sensor for gas RAPIFLOW®
- Model No.
- FSM2
Discontinued some variations
P4* Series for rechargeable battery manufacturing processes
【Discontinued model】
Alternative model : FSM3 Series
*Separated display FSM2-D Series is still on sale.
A small flow sensor for gas with 2-screen 2-color display. It offers two types: integrated and separated display.
The use of copper, zinc, and nickel-based materials and electrolytic nickel plating is limited in the construction of the flow path part and sliding part as standard.
- Industry

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Safety Precautions
CKD plus Members Only
[Compact even with large flow rate]
Flow rate range: 0.5 to 1,000 ℓ/min
With the 500 and 1000 ℓ/min types, the body size has been reduced by 30% compared to conventional models, attaining high downsizing.

[Straight piping section not required]
As a rectifier mechanism is built in, straight piping sections are not required at either the upstream or downstream sides, allowing it to be installed anywhere.

[Bi-directional measurement]
The flow direction can be randomly set for measurement with the display integrated bi-directional type.

[High-speed response]
The platinum sensor chip manufactured with silicon micromachining realizes the response time of 50 m/sec.
Model No. | Product name | Flow rate range (L/min) | Port size (ø, Rc) | Remarks |
---|---|---|---|---|
FSM2-D | Separated display (Rechargeable battery manufacturing processes) | |||
FSM2-A | Separated display (Rechargeable battery manufacturing processes) | 0.5 to 1000 | 4 to 10, 1/8, 1/4, 1/2 | Discontinued 2022 01 31 |
FSM2-N | Display integrated (switch output NPN 2 points, analog output 1 point) (Rechargeable battery manufacturing processes) | 0.5 to 1000 | 4 to 10, 1/8, 1/4, 1/2 | Discontinued 2022 01 31 |
FSM2-P | Display integrated (switch output PNP 2 points, analog output 1 point) (for secondary battery manufacturing process) | 0.5 to 1000 | 4 to 10, 1/8, 1/4, 1/2 | Discontinued 2022 01 31 |
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