Product Details
Floating plates
Glass float module
- Model No.
- GFM
Float plate that enables non-contact floating transport.
Select from 5 types of rails and pads according to various applications.
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[Non-contact floating transport]
By adopting a new porous material, stable floating is achieved.
Smooth transport is possible without touching the workpiece.
Antistatic protection for workpieces is also possible.

[Improved visibility]
The use of a black body prevents diffused reflection and improves the visibility of the workpiece.
Ideal for high-sensitivity inspection.
Suppression of particles in floating air is realized.
[Selectable according to applications]
Float pad and rail type can be freely selected according to the application, such as precision floating, rough transport, or process loader.

Model No. | Product name | Float (guideline) | Applications | Remarks |
---|---|---|---|---|
GFM-A | Floating alignment pad | 10 μm or more | Positioning | |
GFM-T | High float rail | 250 μm or more | Rough transport | |
GFM-RF | Float rail | 250 μm or more | Transport | |
GFM-RS | Float rail | 150 μm or more | Loader and unloader | |
GFM-P | Precision floating stage | 30 μm or more | Various processes |
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