Direct acting 3-port solenoid valves
Direct acting 3-port valve
- Model No.
Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
air blow, etc.)
3QE / Z Series for positive pressure only,
3QB Series for positive and negative pressure,
3QR Series with large flow rate for positive and negative pressure.
[Cylinder bore size: φ6 to φ20]
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Oxygen concentrator
- Dialysis monitoring equipment
- Dental equipment
[Environmental performance] (3QE / 3QZ Series)
In addition to high durability, stable responsiveness is realized by prevention of malfunction and snagging due to foreign matter.
Suppresses heat generation and reduces electricity.
[Maintainability] (3QE / 3QZ Series)
Upward/lateral common wiring connector and manual override realize ease of use and high maintainability.
Enables continuous energization. (Option)
[Compact and lightweight] (3QB Series)
Valve width 10 mm.
Weight 12.5 g.
[3QB low vacuum, positive pressure switching] (3QB Series)
Low vacuum and positive pressure can be freely combined.
Can be customized.
[High performance] (3QR Series)
Selectable flow rate.
Large flow rate 0.4 d㎥/(s/bar)
Standard: 0.3 d㎥/(s/bar)
High response: 4 ±1 ms / 1.5 ±1 ms (ON/OFF).
|Model No.||Product name||Piping port position||Port size||Remarks|
|3QE||Positive pressure dedicated Single unit||Base side piping||M5|
|3QB||Positive / negative pressure switching, large flow rate Single unit||Base side piping||M5|
|3QRA||Positive / negative pressure switching, large flow rate Single unit||Body piping||M5|
|3QRB||Positive / negative pressure switching, large flow rate Single unit||Base side piping||M5|
|M3QE||Positive pressure dedicated Individual wiring manifold||Base side piping||M5|
|M3QZ||Positive pressure dedicated Individual wiring manifold||Base rear piping||M5|
|M3QB||Positive pressure dedicated Individual wiring manifold||Base side piping||M5|
|M3QRA||Positive / negative pressure switching, large flow rate Individual wiring manifold||Body piping||M5, Rc1/8|
|M3QRB||Positive / negative pressure switching, large flow rate Individual wiring manifold||Base side piping||M5, Rc1/8|
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- Fluid control components
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