Product Details
Direct acting 3-port solenoid valves
Direct acting 3-port valve
- Model No.
- 3QR・3QB・3QE・3QZ
Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
air blow, etc.)
3QE / Z Series for positive pressure only,
3QB Series for positive and negative pressure,
3QR Series with large flow rate for positive and negative pressure.
[Cylinder bore size: φ6 to φ20]
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Oxygen concentrator
- Dialysis monitoring equipment
- Dental equipment
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
[Environmental performance] (3QE / 3QZ Series)
In addition to high durability, stable responsiveness is realized by prevention of malfunction and snagging due to foreign matter.
Suppresses heat generation and reduces electricity.
[Maintainability] (3QE / 3QZ Series)
Upward/lateral common wiring connector and manual override realize ease of use and high maintainability.
Enables continuous energization. (Option)
[Compact and lightweight] (3QB Series)
Valve width 10 mm.
Weight 12.5 g.
[3QB low vacuum, positive pressure switching] (3QB Series)
Low vacuum and positive pressure can be freely combined.
Can be customized.
[High performance] (3QR Series)
Universal structure.
Selectable flow rate.
Large flow rate 0.4 d㎥/(s/bar)
Standard: 0.3 d㎥/(s/bar)
High response: 4 ±1 ms / 1.5 ±1 ms (ON/OFF).
| Model No. | Product name | Piping port position | Port size | Remarks |
|---|---|---|---|---|
| 3QE | Positive pressure dedicated Single unit | Base side piping | M5 | |
| 3QB | Positive / negative pressure switching, large flow rate Single unit | Base side piping | M5 | |
| 3QRA | Positive / negative pressure switching, large flow rate Single unit | Body piping | M5 | |
| 3QRB | Positive / negative pressure switching, large flow rate Single unit | Base side piping | M5 | |
| M3QE | Positive pressure dedicated Individual wiring manifold | Base side piping | M5 | |
| M3QZ | Positive pressure dedicated Individual wiring manifold | Base rear piping | M5 | |
| M3QB | Positive pressure dedicated Individual wiring manifold | Base side piping | M5 | |
| M3QRA | Positive / negative pressure switching, large flow rate Individual wiring manifold | Body piping | M5, Rc1/8 | |
| M3QRB | Positive / negative pressure switching, large flow rate Individual wiring manifold | Base side piping | M5, Rc1/8 |
- Search Conditions
- Model No.
- Product Category
- Directional control valves
- Direct acting 3-port solenoid valves
- Specific Use
- All
- Industry
- All
- New Products Only
- Discontinued Products Only