Product Details
Direct acting 3-port solenoid valves
Block manifold
- Model No.
- MN3Q
Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and exhaust port can be selected, increasing freedom in piping management.
[Cylinder bore size: φ4 to φ16]
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
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Safety Precautions
User's Manual
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[Downsizing]
For direct mounting, height 34 mm.
For DIN rail mounting, height 39 mm.
Installable in narrow spaces.
[Panel mounting possible]
The outlet position of the supply and exhaust port can be selected, increasing freedom in piping management.
[Flat cable, D sub-connector]
Select from upward and lateral directions for the connector leadout direction.
| Model No. | Product name | Mounting method | Port size | Remarks |
|---|---|---|---|---|
| N3Q0660 | Single valve block | DIN rail mount | Push-in fitting φ1.8, φ3, φ4, M5 | |
| MN3Q0660 | Block manifold | DIN rail mount | Push-in fitting φ1.8, φ3, φ4, M5 | |
| MT3Q0660 | Block manifold | Direct mounting method | Push-in fitting φ1.8, φ3, φ4, M5 |
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