Product Details
Direct acting 3-port solenoid valves
Block manifold
- Model No.
- MN3Q
Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and exhaust port can be selected, increasing freedom in piping management.
[Cylinder bore size: φ4 to φ16]
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products

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Model No. | Product name | Mounting method | Port size | Remarks |
---|---|---|---|---|
N3Q0660 | Single valve block | DIN rail mount | Push-in fitting φ1.8, φ3, φ4, M5 | |
MN3Q0660 | Block manifold | DIN rail mount | Push-in fitting φ1.8, φ3, φ4, M5 | |
MT3Q0660 | Block manifold | Direct mounting method | Push-in fitting φ1.8, φ3, φ4, M5 |
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