Product Details

Direct acting 3-port solenoid valves

Block manifold

Model No.
MN3Q

Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and exhaust port can be selected, increasing freedom in piping management.
[Cylinder bore size: φ4 to φ16]

Industry
  • Semiconductor manufacturing process (pre-process)
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • N2 purging related products

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  • Features
  • Variations

[Downsizing]
For direct mounting, height 34 mm.
For DIN rail mounting, height 39 mm.
Installable in narrow spaces.

[Panel mounting possible]
The outlet position of the supply and exhaust port can be selected, increasing freedom in piping management.

[Flat cable, D sub-connector]
Select from upward and lateral directions for the connector leadout direction.

Model No. Product name Mounting methodPort size Remarks
N3Q0660Single valve blockDIN rail mountPush-in fitting φ1.8, φ3, φ4, M5
MN3Q0660Block manifoldDIN rail mountPush-in fitting φ1.8, φ3, φ4, M5
MT3Q0660Block manifoldDirect mounting methodPush-in fitting φ1.8, φ3, φ4, M5

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