Product Details
Pilot operated 3, 4, 5-port solenoid valves
PLC-compatible block manifold
- Model No.
- MN3E・MN4E
More compact (39.5 mm high) and high-performance cassette 3, 4-port block manifold is also available.
[Cylinder bore size: φ20 to φ40]
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
[Abundant communication support]
Compatible with EtherNet / IP, EtherCAT, CC-Link, and DeviceNet.
*November 2020, EtherNet/IP added.
[Thin / space saving]
MN3/4E00 Series is the thinnest at 7 mm, contributing to space saving.
MN3/4E 0 series is a 10 mm high performance block manifold not only contributing to space saving, but also offering excellent responsiveness. (N3E0 Series two 3-port valves integrated type: A.B port both 12 ms)
[Environmental conservation]
Lighter weight and reduced material usage by downsizing / energy saving.
We were among the earliest to reduce chemical substances affecting the environment, including lead-free solder and materials compatible with JIG-101A level A.
With energy saving type (Option E), it further reduces power consumption.
[Wide range of fitting variations]
Inch size compatible with push-in fitting, ideal for use in the Western market.
It also supports φ3 and φ1.8 tubes, contributing to space saving of piping.
[Wide array of electrical connections]
Serial transmission corresponding to various connectors and networks are available.
Also supports individual wiring.
Easily pluggable regulator blocks are also available.
[Pursuit of safety]
Exhaust check valve, manual cover to prevent misoperation and air supply filter to prevent entry of foreign matter are provided as standard.
Model No. | Product name | Valve pitch | Port size | Remarks |
---|---|---|---|---|
MN3E00 | 3-port valve | 7 mm | Push-in fitting φ1.8 to 4, M3 | |
MN3E0 | 3-port valve | 10 mm | Push-in fitting φ1.8 to 6, M5 | |
MN4E00 | 4-port valve | 7 mm | Push-in fitting φ1.8 to 4, M3 | |
MN4E0 | 4-port valve | 10 mm | Push-in fitting φ1.8 to 6, M5 |
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