Product Details


Inline clean filter

Model No.

Inline clean filter with hollow fiber membrane for filter element provides high performance in all aspects including filtration performance, flow rate, pressure loss, service life and installation space.

  • Physicochemical analysis equipment

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  • Features
  • Variations

[Adopts original hollow fiber membrane]
Hollow fiber membrane element has enabled 0.01 μm high precision filtration and 99.99% removal efficiency.
The resin type has a transparent case so dirt on the element can be visually checked.

[Long service life]
Considerably longer service life. Approximately five times longer than the flat membrane type.
Three to ten times filtration area enables larger flow rate and less pressure loss than the flat membrane type of the same capacity.
Lighter and more compact at the same flow rate.


Conveying liquid crystal substrate (contactless)

Model No. Product name Port sizeFiltration (μm)Processing flow rate (ℓ/min [ANR]) Remarks
FCS500Inline clean filter Resin typeR1/8, R1/4, φ4, φ6, φ80.0150
FCS500-P9※Inline clean filter Stainless steel typeRc1/8, Rc1/40.0150 / 80
FCS1000Inline clean filter Resin typeR1/4, R3/8, Rc1/4, Rc3/8, φ8, φ10, φ120.01300 to 400
FCS1000-P9※Inline clean filter Stainless steel type (Made-to-order)Rc1/4, Rc3/80.01300 to 400

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