Product Details

Special cylinders

Air bearing actuator

Model No.
LBC

Air static pressure soft actuator based on non-contact air bearing mechanism with zero sliding resistance. The actuator enables sensitive and precise load control when combined with electro pneumatic regulator (EV).

Industry
  • Semiconductor manufacturing process (post-process)
  • Implementation

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  • Features
  • Variations

[Sliding resistance zero]
Completely contactless with zero sliding resistance, so thrust control linearly proportional to supply pressure with high response is possible.

[Clean]
There is no dust generation as it is completely contactless.

Model No. Product name Thrust (N) Remarks
LBC-01Single acting / push1
LBC-05Single acting / push5
LBC-30Single acting / push10

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