Product Details
Electro pneumatic regulators
Electro pneumatic regulator
- Model No.
- EVS2
NEW
[NEW] Variation added
30 mm wide compact, lightweight and high performance electro pneumatic regulator.
Ideal for controlling pilot regulators, pressure and fine speed cylinders in the semiconductor and precision assembling fields.
- Industry
- Semiconductor manufacturing process (post-process)
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[Improved performance and variations added]
(1) Resolution up to 0.1%F.S. → up to 0.05%F.S.
(2) Pressure variations -100kPa (negative pressure), 200kPa (medium pressure), and 900kPa (high pressure) added
[Compact]
30 x 39 x 57.1 (Width x Height x Length).
As it is compact and lightweight, it contributes to downsizing of equipment.
[High precision]
High precision and high-speed response control of fluid pressure using electric signals.
Repeatability: 0.3% F.S.
Resolution 0.1% F.S.
Response time: 0.1 sec (no load)
[2-color display of the operational status]
On the 2-color operation indicator, green means the pressure is within the set value and red means the pressure is outside the set value or an error status.
[Easy to pipe / wire]
Air piping: Push-in fitting, Electric wiring: M12 fitting is adopted, so piping and wiring work is easy.
Model No. | Product name | Pressure control range (MPa) | Port size (φ) | Remarks |
---|---|---|---|---|
EVS2-100 | Electro pneumatic regulator | 0.001 to 0.1 | 4, 6 | |
EVS2-500 | Electro pneumatic regulator | 0.005 t0 0.5 MPa | 4, 6 | |
EVS2-10V | Electro pneumatic regulator | -0.0053 to -0.0912 | 4,6 | |
EVS2-200 | Electro pneumatic regulator | 0.002 to 0.2 | 4,6 | |
EVS2-900 | Electro pneumatic regulator | 0.009 to 0.9 | 4,6 |
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