Electro pneumatic regulators
Electro pneumatic regulator
- Model No.
30 mm wide compact, lightweight and high performance electro pneumatic regulator.
Ideal for controlling pilot regulators, pressure and fine speed cylinders in the semiconductor and precision assembling fields.
- Semiconductor manufacturing process (post-process)
30 x 39 x 57.1 (Width x Height x Length).
As it is compact and lightweight, it contributes to downsizing of equipment.
High precision and high-speed response control of fluid pressure using electric signals.
Repeatability: 0.3% F.S.
Resolution 0.1% F.S.
Response time: 0.1 sec (no load)
[2-color display of the operational status]
On the 2-color operation indicator, green means the pressure is within the set value and red means the pressure is outside the set value or an error status.
[Easy to pipe / wire]
Air piping: Push-in fitting, Electric wiring: M12 fitting is adopted, so piping and wiring work is easy.
|Model No.||Product name||Pressure control range (MPa)||Port size (φ)||Remarks|
|EVS2-100||Electro pneumatic regulator||0.001 to 0.1||4, 6|
|EVS2-500||Electro pneumatic regulator||0.005 t0 0.5 MPa||4, 6|
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