Product Details

Electro pneumatic regulators

Electro pneumatic regulator

Model No.

30 mm wide compact, lightweight and high performance electro pneumatic regulator.
Ideal for controlling pilot regulators, pressure and fine speed cylinders in the semiconductor and precision assembling fields.

  • Semiconductor manufacturing process (post-process)

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  • Features
  • Variations

30 x 39 x 57.1 (Width x Height x Length).
As it is compact and lightweight, it contributes to downsizing of equipment.

[High precision]
High precision and high-speed response control of fluid pressure using electric signals.
Repeatability: 0.3% F.S.
Resolution 0.1% F.S.
Response time: 0.1 sec (no load)

[2-color display of the operational status]
On the 2-color operation indicator, green means the pressure is within the set value and red means the pressure is outside the set value or an error status.

[Easy to pipe / wire]
Air piping: Push-in fitting, Electric wiring: M12 fitting is adopted, so piping and wiring work is easy.

Model No. Product name Pressure control range (MPa)Port size (φ) Remarks
EVS2-100Electro pneumatic regulator0.001 to 0.14, 6
EVS2-500Electro pneumatic regulator0.005 t0 0.5 MPa4, 6

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