Product Details


Pilot regulator

Model No.


A regulator designed to stabilize the pressure fluctuation of chemical liquids and pure water supply parts using pilot air control. By combining with an electro pneumatic regulator, it is also possible to remotely adjust the set pressure.

  • Semiconductor manufacturing process (pre-process)

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  • Features
  • Variations

[High precision / high-speed response]
High-precision pressure stability and high-speed response of the diaphragm structure.
Flow path structure with less retention area improves the displacement characteristics.
Wetted parts are all made of fluorine resin to achieve high clean levels and high corrosion resistance.

[Pressure fluctuation reduction]
Pulsation from diaphragm pump can be inhibited.
The set pressure can also be changed remotely depending on product or recipe differences.

[Added ‘Compact’ lineup]
Space-saving PMP002 Series were added to 1/4", 3/8" port sizes.

Model No. Product name Recommended flow rateConnection size (tube exterior/thread diameter)Connection Remarks
PMP002Small size0.2~3ℓ/min1/4”, 3/8” 6mm, 10mmSUPER 300
PMP202Small to medium bore size0.2 to 5 ℓ/min1/4”, 3/8” 6 mm, 10 mmSUPER 300, F-LOCK60
PMP402Large bore size2 to 20 ℓ/min1/2”, 3/4”, 1” 12 mm, 25 mmSUPER 300

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