Product Details

Air operated valves

Air operated valve for chemical liquids

Model No.
AMD※※・AMG※※

Discontinued some variations

Basic air operated valve for chemical liquids.
A lineup of basic fittings.

Industry
  • Semiconductor manufacturing process (pre-process)

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  • Features
  • Variations

It can be used for coaters and developers that use organic solvent.

Model No. Product name Orifice sizeConnection size (tube exterior/thread diameter)Connection Remarks
AMDZ※2-port valve (Miniature)2 to 4 mm1/8”, 1/4”, 3 mm, 6 mmSuper Type, Super 300, F-LOCK20/60, Final Lock, Flaretek, Rc
AMD0※2-port valve (Compact)2 to 4 mm1/8”, 1/4”, 3 mm, 6 mmSuper Type, Super 300, F-LOCK20/60, Final Lock, Flaretek, Rc
AMGZ※3-port valve (Miniature)2 to 4 mm1/8”, 1/4”, 3 mm, 6 mmSuper Type, Super 300, F-LOCK20/60, Final Lock, Flaretek
AMG0※3-port valve (Compact)2 to 4 mm1/8”, 1/4”, 3 mm, 6 mmSuper Type, Super 300, F-LOCK20/60, Final Lock, Flaretek
AMD※※2-port valve (Medium to large type)8 to 25 mm3/8”, 1/2”, 3/4”, 1” 10 mm, 12 mm, 25 mmSuper Type, F-LOCK20/20A, RcDiscontinued
2018 09 30

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