Product Details

Integrated gas supply system

Integrated gas supply system

Model No.

A process gas supply system that takes up less space and offers improved maintainability.
We do it all based on the processes you need, from design to manufacturing.
1.125 inch, W seal supported.

  • Semiconductor manufacturing process (pre-process)
  • Components for chemical gas supply facilities

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  • Features
  • Variations

[Integrated unit]
The process gas supply line has been compactly integrated using standardized parts.
Achieves an ideal flow path that enables high-speed substitution of process gas and inert gas.
We deliver after designing, assembling and testing, reducing the labor required from the customer.

Model No. Product name ContentSizeConnection Remarks
IAGD5Integrated gas supply system--W seal
MAGD5-RComponents for integrated gas supply systemAir operated valve1.125inch-
MMGD5-RComponents for integrated gas supply systemManual valve1.125inch-
MFGD5Components for integrated gas supply systemFlow rate adjusting valve1.125inch-
MCPG5Components for integrated gas supply systemCheck valve1.125inch-

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