Product Details
Integrated gas supply system
Integrated gas supply system
- Model No.
- IAGD5
A process gas supply system that takes up less space and offers improved maintainability.
We do it all based on the processes you need, from design to manufacturing.
1.125 inch, W seal supported.
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical gas supply facilities
- Documents / Download
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Safety Precautions
CKD plus Members Only
[Integrated unit]
The process gas supply line has been compactly integrated using standardized parts.
Achieves an ideal flow path that enables high-speed substitution of process gas and inert gas.
We deliver after designing, assembling and testing, reducing the labor required from the customer.
| Model No. | Product name | Content | Size | Connection | Remarks |
|---|---|---|---|---|---|
| IAGD5 | Integrated gas supply system | - | - | W seal | |
| MAGD5-R | Components for integrated gas supply system | Air operated valve | 1.125inch | - | |
| MMGD5-R | Components for integrated gas supply system | Manual valve | 1.125inch | - | |
| MFGD5 | Components for integrated gas supply system | Flow rate adjusting valve | 1.125inch | - | |
| MCPG5 | Components for integrated gas supply system | Check valve | 1.125inch | - |
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