Product Details
Integrated gas supply system
Integrated gas supply system
- Model No.
- IAGD3
A process gas supply system that takes up less space and offers improved maintainability.
We do it all based on the processes you need, from design to manufacturing.
1.5 inch, CS seal supported.
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical gas supply facilities
- Documents / Download
PDF Catalog
Safety Precautions
CKD plus Members Only
[Integrated unit]
The process gas supply line has been compactly integrated using standardized parts.
Achieves an ideal flow path that enables high-speed substitution of process gas and inert gas.
We deliver after designing, assembling and testing, reducing the labor required from the customer.
| Model No. | Product name | Content | Size | Connection | Remarks |
|---|---|---|---|---|---|
| IAGD3 | Integrated gas supply system | - | - | CS seal | |
| MAGD3 | Components for integrated gas supply system | Air operated valve | 1.5inch | - | |
| MOGD3 | Components for integrated gas supply system | Manual valve | 1.5inch | - | |
| MFGD3 | Components for integrated gas supply system | Flow rate adjusting valve | 1.5inch | - | |
| MCGP3 | Components for integrated gas supply system | Check valve | 1.5inch | - |
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