Product Details
High vacuum components
Vacuum pressure control system
- Model No.
- IAVB
While maintaining the reliability of the conventional high vacuum valve, it has achieved pressure control that enables various processes.
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
CKD plus Members Only
| Model No. | Product name | Connection | Remarks |
|---|---|---|---|
| IAVB※17 | Vacuum pressure control system | NW16, 25, 40, 50 | |
| IAVB-CONT | Controller for IAVB | - |
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