Product Details

High vacuum components

Vacuum pressure control system

Model No.

While maintaining the reliability of the conventional high vacuum valve, it has achieved pressure control that enables various processes.

  • Semiconductor manufacturing process (pre-process)
  • Semiconductor manufacturing process (post-process)

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  • Features
  • Variations

[Slow exhaust control is possible]
Compared with general ON / OFF vacuum valves and two-stage exhaust vacuum valves, it enables gradual exhaust at a constant rate.

[Pressure control function added]
A pressure control function has been added to the highly reliable vacuum valve.
Regulator and variable leak are not required for pressure adjustment in vacuum.
The poppet valve system enables fully closed operation, a problem for butterfly valves, through the O-ring sealing structure.

[Easy maintenance]
The valves and wiring components can be maintained separately.

Model No. Product name Connection Remarks
IAVB※17Vacuum pressure control systemNW16, 25, 40, 50
IAVB-CONTController for IAVB-

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