Product Details

High vacuum components

Electric vacuum valve

Model No.

Discontinued 2021 03 31

【Discontinued model】
Alternative model : IAVB Series

Electric vacuum valve which achieves diverse conductance by motorizing the valve opening.

  • Semiconductor manufacturing process (pre-process)
  • Semiconductor manufacturing process (post-process)

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  • Features
  • Variations

[Opening set in 30 points motor drive]
Opening adjustment with motor drive by external signal.
Minimum pitch 0.15 mm (for NW25).
Ideal for simple conductance variable systems and automation of vacuum control.

[Opening monitoring function, various signal output functions]
Current opening is monitored with built-in encoder.
Operation completion signal of valve open/closed status, alarm output function equipped for peace of mind.

Model No. Product name Connection Remarks
EVB※17Electric vacuum valveNW25, 40, 50Discontinued
2021 03 31
Old Catalog

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