Product Details
High vacuum components
Electric vacuum valve
- Model No.
- EVB
Discontinued 2021 03 31
【Discontinued model】
Alternative model : IAVB Series
Electric vacuum valve which achieves diverse conductance by motorizing the valve opening.
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
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[Opening set in 30 points motor drive]
Opening adjustment with motor drive by external signal.
Minimum pitch 0.15 mm (for NW25).
Ideal for simple conductance variable systems and automation of vacuum control.
[Opening monitoring function, various signal output functions]
Current opening is monitored with built-in encoder.
Operation completion signal of valve open/closed status, alarm output function equipped for peace of mind.
| Model No. | Product name | Connection | Remarks |
|---|---|---|---|
| EVB※17 | Electric vacuum valve | NW25, 40, 50 | Discontinued 2021 03 31Old Catalog |
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