Product Details

Process gas components

Air operated valve

Model No.
AGD

Standard valve for process gas that uses a metal diaphragm.
It supports many variations such as 3-way valves and 2-station 3-way valves as well as single unit and integrated types.

Industry
  • Components for chemical gas supply facilities
  • Components for chemical liquid supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

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  • Features
  • Variations

[Standard]
Durability: 1 million cycles (actual value: 4 million cycles)
Supports integrated gas supply systems (1.5inch, 1.125inch)

[Improved inner seal performance]
Reduced particle generation is achieved with optimal seal structure and improved surface roughness.

Model No. Product name ConnectionActuation Remarks
AGD0※R-4RMAir operated valve for process gas1/4”JXR male fittingNC, NO
AGD0※R-4RAir operated valve for process gas1/4”JXR female fittingNC, NO
AGD1※R-4RMAir operated valve for process gas1/4”JXR male fittingNC, NO
AGD1※R-4RAir operated valve for process gas1/4”JXR female fittingNC, NO
AGD1※R-4SAir operated valve for process gas1/4”double barbed fittingNC, NO
AGD2※R-6RMAir operated valve for process gas3/8”JXR male fittingNC, NO
AGD2※R-6RAir operated valve for process gas3/8”JXR female fittingNC, NO
AGD2※R-6SAir operated valve for process gas3/8”double barbed fittingNC, NO

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