Product Details
High-durability valve
High-durability process gas valve for high temperatures
- Model No.
- AGD
A valve for process gas that offers the high durability needed to keep up with advances in refinement.
Three types are available to meet your needs.
- Industry
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
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[AGD-HD Series]
Durability: 10 million cycles guaranteed (actual value: 30 million cycles)
Supports integrated gas supply systems (1.5 inch, 1.125 inch)
Supports single valves
[AGD-HDF Series]
Durability: 10 million cycles guaranteed (actual value: 30 million cycles)
High temperature support: Up to 200°C
Supports integrated gas supply systems (1.5 inch, 1.125 inch)
Supports single valves
Equipped with stable response actuator
[AGD21R-A Series]
Durability: 30 million cycles guaranteed (actual value: 100 million cycles)
Fluid temperatures of 150 to 200°C supported
Supports integrated gas supply systems (1.5 inch)
Equipped with stable response actuator
High Cv: 0.4 or more
| Model No. | Product name | Fluid temperature | Actual value | Remarks |
|---|---|---|---|---|
| AGD※※R-HD | High-durability process gas valve | 5 to 80°C | 30 million times and over | |
| AGD※※R-HDF | High temperature/high durability valve | 20 to 200°C | 30 million times and over | |
| AGD21R-A | High temperature/high durability valve | 150 to 200°C | 100 million plus cycles |
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