Product Details

High-durability valve

High-durability process gas valve for high temperatures

Model No.
AGD

A valve for process gas that offers the high durability needed to keep up with advances in refinement.
Three types are available to meet your needs.

Industry
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

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  • Features
  • Variations

[AGD-HD Series]
Durability: 10 million cycles guaranteed (actual value: 30 million cycles)
Supports integrated gas supply systems (1.5 inch, 1.125 inch)
Supports single valves

[AGD-HDF Series]
Durability: 10 million cycles guaranteed (actual value: 30 million cycles)
High temperature support: Up to 200°C
Supports integrated gas supply systems (1.5 inch, 1.125 inch)
Supports single valves
Equipped with stable response actuator

[AGD21R-A Series]
Durability: 30 million cycles guaranteed (actual value: 100 million cycles)
Fluid temperatures of 150 to 200°C supported
Supports integrated gas supply systems (1.5 inch)
Equipped with stable response actuator
High Cv: 0.4 or more

Model No. Product name Fluid temperatureActual value Remarks
AGD※※R-HDHigh-durability process gas valve5 to 80°C30 million times and over
AGD※※R-HDFHigh temperature/high durability valve20 to 200°C30 million times and over
AGD21R-AHigh temperature/high durability valve150 to 200°C100 million plus cycles

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