Product Details
Process gas components
Vacuum generator
- Model No.
- VG
Energy saving vacuum exhaust equipment. Vacuum generator for process gas exhaust.
Nozzle diameter: φ0.5
- Industry
- Components for chemical gas supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
[Energy saving]
Reduces the consumption of supply fluid.
Resistant to primary side pressure fluctuation.
| Model No. | Product name | O-ring material | Remarks |
|---|---|---|---|
| VG-05F | Vacuum generator | FKM | |
| VG-05P | Vacuum generator | Kalrez |
- Search Conditions
- Model No.
- Product Category
- All
- Specific Use
- All
- Industry
- Semiconductor manufacturing process
- Components for chemical gas supply facilities
- New Products Only
- Discontinued Products Only