Product Details
Process gas components
Regulator for process gas
- Model No.
- PGM
Regulator for process gas that uses a metal diaphragm.
It helps stabilize gas pressure and flow rate.
- Industry
- Components for chemical gas supply facilities
- N2 purging related products
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[High precision]
A high-spec design that supports high-purity gas and high-precision control.
High-precision control of ultra-low flow rate and pressure.
Low hysteresis and reduced pressure drop.
| Model No. | Product name | Flow rate series | Secondary set pressure | Remarks |
|---|---|---|---|---|
| PGM-30V | Regulator for process gas | 20ℓ/min | -0.07 to 0.21MPa | |
| PGM-30 | Regulator for process gas | 20ℓ/min | 0 to 0.21MPa | |
| PGM-50 | Regulator for process gas | 20ℓ/min | 0 to 0.35MPa | |
| PGM-100 | Regulator for process gas | 20ℓ/min | 0 to 0.7MPa | |
| PGM-H-60 | Regulator for process gas | 50ℓ/min | 0 to 0.42MPa | |
| PGM-H-100 | Regulator for process gas | 50ℓ/min | 0 to 0.7MPa |
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