Product Details
Pilot operated 3-port valves
3-port pilot operated valve
- Model No.
- 3KA1
Improved wear resistance and sliding performance of sliding parts, greatly improved life and stabilized responsiveness achieved.
[Cylinder bore size: upto φ40]
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
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[High reliability]
Reliable soft spool is used.
[Long service life]
Packing with excellent wear resistance adopted.
[Responsivity]
Responsivity upon initial operation is stabilized with the special packing.
| Model No. | Product name | Piping port position | Port size | Remarks |
|---|---|---|---|---|
| 3KA1 | 3-port single unit valve | Body piping | Push-in fitting φ4, φ6, M5 |
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