Product Details
Pilot operated 3-port valves
3-port pilot operated valve
- Model No.
- 3GD/ER
3-port valve with improved environmental performance, safety, reliability, and ease of use. High-function.
[Cylinder bore size: φ20 to φ100]
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
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Safety Precautions
User's Manual
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[Environmental performance]
Continuous energization is made possible by adopting a new coil actuator.
Reduced power consumption is also achieved. (0.35 W, 0.1 W / low exoergic / energy type]
[Ease of use]
Wiring connector can be moved freely upwards and sideways.
As the D sub-connector is also a rotary type, it can be moved freely upwards and sideways.
| Model No. | Product name | Piping port position | Port size | Remarks |
|---|---|---|---|---|
| 3GD※R | 3-port single unit valve | Body piping | Φ4, Φ6, Φ8, Φ10, M5, Rc1/8, 1/4 | |
| 3GE※R | 3-port single unit valve | Base piping | Rc1/8, 1/4 |
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