Product Details

Flow sensors / controllers

Miniature flow rate sensor for gas RAPIFLOW (R)

Model No.
FSM

Discontinued some variations

Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the like thanks to its light weight and high-speed response.

Industry
  • Semiconductor manufacturing process (post-process)

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  • Features
  • Variations

[Miniature/lightweight] (FSM-X Series)
Compact body enabled by separating the sensor head.
Reduced volume by 52% compared to conventional products, light weight of 4 g and ultra-thin 8 mm are realized.
It is available as sensor head only and with flow path block.

[Non-linear characteristics] (FSM-X Series)
Since the analog output has non-linear characteristics, the resolution in low flow rate range is improved.

[High-speed response] (FSM-V / FSM-X Series)
5 ms high-speed response has made possible a design once abandoned

[Bi-directional measurement] (FSM-V / FSM-X Series)
Bidirectional measurement is possible, making it ideal for suction confirmation.

Model No. Product name Port size (φ, M) Remarks
FSM-XFlow rate switch [non-linear]4,5
FSM-VFlow rate sensor [linear]1.8,4,5
FSM-V-DDisplay-
FSM-VFMInline filter dedicated for FSM/FSM-V-
FSM-AAnalog output 1 pointDiscontinued
2009 03 31
【Discontinued model】
Alternative model : FSM2 Series
FSM-NSwitch output NPN 2 points, analog output 1 pointDiscontinued
2009 03 31
【Discontinued model】
Alternative model : FSM2 Series
FSM-PSwitch output PNP 2 points, analog output 1 pointDiscontinued
2009 03 31
【Discontinued model】
Alternative model : FSM2 Series

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