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Siloxane/Ozone Remover

Model No.
SFX

NEW

This remover is dedicated for the adsorption of siloxane and the decomposition of ozone.
With a high removal rate of 99%, compressed air and nitrogen gas can be used under pressurize.

Industry
  • Semiconductor manufacturing process (post-process)
  • Implementation

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  • Features
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[Removal of two types of contaminants]
Activated carbon element is used to either remove siloxane or ozone.

[High pressure compatible]
Compressed air/nitrogen gas can be used under pressure.

[High removal rate]
More than 99% siloxane adsorption and ozone decomposition performance.

[Space saving]
Modular connection to CKD preparation components enable　reduced piping.

Model No. Product name Connection processAmbient and Fluid temperatures Remarks
SFX40-8Siloxane/Ozone RemoverRc1/45～50℃
SFX40-10Siloxane/Ozone RemoverRc3/85～50℃
SFX40-15Siloxane/Ozone RemoverRc1/25～50℃

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