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Siloxane/Ozone Remover

Model No.
SFX

NEW

This remover is dedicated for the adsorption of siloxane and the decomposition of ozone.
With a high removal rate of 99%, compressed air and nitrogen gas can be used under pressurize.

Industry
  • Semiconductor manufacturing process (post-process)
  • Implementation
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  • Features
  • Variations

[Target removal substances]
Either siloxane or ozone can be removed with a single model.

[Operating fluid]
Can be used with compressed air or nitrogen gas while in a pressurized state.

[Removal rate]
Achieves high removal performance of 99% or more with our original activated carbon filter.

[Two size variations]
Selectable from two types, standard and high flow rate, depending on the application.

[Space saving]
Modular connection with our air preparation components realize space savings.

Model No. Product name Bore sizeMaximum processing flow rate(Siloxane) ※At a primary pressure of 0.7 MpaMaximum processing flow rate(Ozone) ※At a primary pressure of 0.7 Mpa Remarks
SFX40-8Siloxane/Ozone RemoverRc1/4700L/min(ANR)560L/min(ANR)
SFX40-10Siloxane/Ozone RemoverRc3/8700L/min(ANR)560L/min(ANR)
SFX40-15Siloxane/Ozone RemoverRc1/2700L/min(ANR)560L/min(ANR)
SFX90-50Siloxane/Ozone RemoverRc26300L/min(ANR)5000L/min(ANR)

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