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Siloxane/Ozone Remover
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- SFX
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This remover is dedicated for the adsorption of siloxane and the decomposition of ozone.
With a high removal rate of 99%, compressed air and nitrogen gas can be used under pressurize.
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- Semiconductor manufacturing process (post-process)
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[Target removal substances]
Either siloxane or ozone can be removed with a single model.

[Operating fluid]
Can be used with compressed air or nitrogen gas while in a pressurized state.

[Removal rate]
Achieves high removal performance of 99% or more with our original activated carbon filter.

[Two size variations]
Selectable from two types, standard and high flow rate, depending on the application.

[Space saving]
Modular connection with our air preparation components realize space savings.

| Model No. | Product name | Bore size | Maximum processing flow rate(Siloxane) ※At a primary pressure of 0.7 Mpa | Maximum processing flow rate(Ozone) ※At a primary pressure of 0.7 Mpa | Remarks |
|---|---|---|---|---|---|
| SFX40-8 | Siloxane/Ozone Remover | Rc1/4 | 700L/min(ANR) | 560L/min(ANR) | |
| SFX40-10 | Siloxane/Ozone Remover | Rc3/8 | 700L/min(ANR) | 560L/min(ANR) | |
| SFX40-15 | Siloxane/Ozone Remover | Rc1/2 | 700L/min(ANR) | 560L/min(ANR) | |
| SFX90-50 | Siloxane/Ozone Remover | Rc2 | 6300L/min(ANR) | 5000L/min(ANR) |
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