Product Details
Flow sensors / controllers
Pneumatic flow rate sensor (integrated display FLUEREX)
- Model No.
- PF・PFU
Discontinued 2019 03 31
【Discontinued model】
Alternative model : PFD Series
Pneumatic flow rate sensor for medium / large flow rate that’s very useful in grasping the current situation and confirming the effect of energy.
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
CKD plus Members Only
[Broad flow rate range]
[PF-F Series]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min
200 to 4000 ℓ/min
0.4 to 8 ㎥
0.8 to 16 ㎥
[PFU Series]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min
[Integrating function provided as standard]
The air consumption of equipment can be easily measured.
[Space saving] (PF-U Series)
Module connection to filter / regulator is possible.
| Model No. | Product name | Flow rate range (L/min) | Port size | Remarks |
|---|---|---|---|---|
| PF500F | Flow rate sensor for compressed air (Medium flow rate) | 25 to 500 | Rc3/8, Rc1/2 | Discontinued 2019 03 31Old Catalog |
| PF2000F | Flow rate sensor for compressed air (Medium flow rate) | 100 to 2000 | Rc1/2, Rc3/4 | Discontinued 2019 03 31Old Catalog |
| PF4000F | Flow rate sensor for compressed air (Medium flow rate) | 200 to 4000 | Rc3/4, Rc1 | Discontinued 2019 03 31Old Catalog |
| PF8000F | Flow rate sensor for compressed air (Large flow rate) | 0.40 to 8.00㎥/min（normal） | Rc1 1/2 | Discontinued 2019 03 31Old Catalog |
| PF16000F | Flow rate sensor for compressed air (Large flow rate) | 0.80 to 16.00㎥/min（normal） | Rc2 | Discontinued 2019 03 31Old Catalog |
| PFU500F | Flow rate sensor for compressed air Module type | 25 to 500 | Rc3/8 | Discontinued 2019 03 31Old Catalog |
| PFU1000F | Flow rate sensor for compressed air modular connection type | 50 to 1000 | Rc3/8 | Discontinued 2019 03 31Old Catalog |
| PFU2000F | Flow rate sensor for compressed air modular connection type | 100 to 2000 | Rc1/2 | Discontinued 2019 03 31Old Catalog |
| PF1000F | Flow rate sensor for compressed air (Medium flow rate) | 50 to 1000 | Rc3/8, Rc1/2 | Discontinued 2006 11 30Old Catalog |
| PF500D | Flow rate sensor for compressed air | 25 to 500 | Rc3/8, Rc1/2 | Discontinued 2006 11 30Old Catalog |
| PF1000D | Flow rate sensor for compressed air | 50 to 1000 | Rc3/8, Rc1/2 | Discontinued 2006 11 30Old Catalog |
| PF2000D | Flow rate sensor for compressed air | 100 to 2000 | Rc3/8, Rc1/2 | Discontinued 2006 11 30Old Catalog |
| PF4000D | Flow rate sensor for compressed air | 200 to 4000 | Rc1/2, Rc1 | Discontinued 2006 11 30Old Catalog |
| PF8000D | Flow rate sensor for compressed air | 400 to 8000 | Rc1, Rc1 1/2 | Discontinued 2006 11 30Old Catalog |
| PF16000E | Flow rate sensor for compressed air | 800 to 16000 | Rc2 | Discontinued 2006 11 30Old Catalog |
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