Product Details

Flow sensors / controllers

Pneumatic flow rate sensor (integrated display FLUEREX)

Model No.
PF・PFU

Discontinued 2019 03 31

Pneumatic flow rate sensor for medium / large flow rate that’s very useful in grasping the current situation and confirming the effect of energy.

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)

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  • Features
  • Variations

[Broad flow rate range]
[PF-F Series]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min
200 to 4000 ℓ/min
0.4 to 8 ㎥
0.8 to 16 ㎥
[PFU Series]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min

[Integrating function provided as standard]
The air consumption of equipment can be easily measured.

[Space saving] (PF-U Series)
Module connection to filter / regulator is possible.

Model No. Product name Flow rate range (L/min)Port size Remarks
PF500FFlow rate sensor for compressed air (Medium flow rate)25 to 500Rc3/8, Rc1/2Discontinued
2019 03 31
Old Catalog
PF2000FFlow rate sensor for compressed air (Medium flow rate)100 to 2000Rc1/2, Rc3/4Discontinued
2019 03 31
Old Catalog
PF4000FFlow rate sensor for compressed air (Medium flow rate)200 to 4000Rc3/4, Rc1Discontinued
2019 03 31
Old Catalog
PF8000FFlow rate sensor for compressed air (Large flow rate)0.40 to 8.00㎥/min(normal)Rc1 1/2Discontinued
2019 03 31
Old Catalog
PF16000FFlow rate sensor for compressed air (Large flow rate)0.80 to 16.00㎥/min(normal)Rc2Discontinued
2019 03 31
Old Catalog
PFU500FFlow rate sensor for compressed air Module type25 to 500Rc3/8Discontinued
2019 03 31
Old Catalog
PFU1000FFlow rate sensor for compressed air modular connection type50 to 1000Rc3/8Discontinued
2019 03 31
Old Catalog
PFU2000FFlow rate sensor for compressed air modular connection type100 to 2000Rc1/2Discontinued
2019 03 31
Old Catalog
PF1000FFlow rate sensor for compressed air (Medium flow rate)50 to 1000Rc3/8, Rc1/2Discontinued
2006 11 30
Old Catalog
PF500DFlow rate sensor for compressed air25 to 500Rc3/8, Rc1/2Discontinued
2006 11 30
Old Catalog
PF1000DFlow rate sensor for compressed air50 to 1000Rc3/8, Rc1/2Discontinued
2006 11 30
Old Catalog
PF2000DFlow rate sensor for compressed air100 to 2000Rc3/8, Rc1/2Discontinued
2006 11 30
Old Catalog
PF4000DFlow rate sensor for compressed air200 to 4000Rc1/2, Rc1Discontinued
2006 11 30
Old Catalog
PF8000DFlow rate sensor for compressed air400 to 8000Rc1, Rc1 1/2Discontinued
2006 11 30
Old Catalog
PF16000EFlow rate sensor for compressed air800 to 16000Rc2Discontinued
2006 11 30
Old Catalog

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